Professor and Thomas C. DeLoach, Jr. Chair
School of Chemical and Bimolecular Engineering
Georgia Institute of Technology
Office: ES&T 2204
Phone: 404.894.5922
Email: dennis.hess@chbe.gatech.edu
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Dr. Hess's research interests are in thin film science and technology, surface and interface modification and characterization, microelectronics processing and electronic materials. His group focuses on the establishment of fundamental structure-property relationships and their connection to chemical process sequences used in the fabrication of novel films, electronic materials, devices, and nanostructures. Control of the surface properties of materials such as dielectrics, semiconductors, metals, and paper or paper board by film deposition or surface modification allows the design of such surfaces for a variety of applications in microelectronics, packaging, sensors, and microfluidics.

The Hess group often uses glow discharges or plasmas for the deposition, etching, and polymerization of thin films or for the modification of surfaces. For example, plasma-deposited fluorocarbon films are being used to generate superhydrophobic paper and cellulose surfaces for self-cleaning and microfluidic applications. The design of novel, low temperature plasma etching processes for the nano-scale patterning of copper films for advanced integrated circuit fabrication is also being studied. Surface cleaning and modification for control of material properties using a variety of liquid and vapor phase approaches are also of interest. Specifically, our group is studying the use of elevated pressure fluids, including supercritical fluids, for environmentally benign surface cleaning, sterilization of medical instruments and materials, and the formation of nanoparticles. Chemical vapor deposition and other film formation methods are being used to deposit graphene, a material that is a possible successor to silicon for future generations of integrated circuits.

Dr. Hess is the Thomas C. DeLoach, Jr. Chair and Director of Georgia Tech’s NSF Materials Research Science and Engineering Center (MRSEC) for New Electronic Materials.


Research Areas of Interest
  • Energy and Sustainability
  • Materials and Nanotechnology
  • Biotechnology

Expertise Keywords

  • Biomedical Electronics
  • Nanomaterials
  • Integrated, 2D & 3D Circuits